• Chemistry and Materials
  • Digital World and Robotics

Micro-Nano Manufacturing Center (CMNF)

Platform

Description

Our platform enables the fabrication of advanced components and systems in various fields such as (bio)MEMS, photonics, power components, high frequency/high throughput devices, micro-energy or acoustics. It is one of the 5 major French academic centers. Our expertise is recognized nationally and internationally in various fields such as electronic lithography or ion implantation. Composed of about twenty qualified engineers and technicians working in close collaboration with researchers, our team works on the most ambitious projects related to micro and nanotechnologies. We are structured around major areas of expertise: Growth and deposition of thin films, Lithography, Etching, Ion Implantation, Process Characterization, Assembly-Prototyping, and BioMicrofluidics. As a member of the RENATECH network (national network of large-scale micro-nanofabrication facilities), we can respond to any request for the development of technological components or the fabrication of devices from other companies or institutes.

Contacts

  • Christophe Lethien
    Deputy director
  • Bertrand Grimbert
    Technical manager

Informations

Avenue Henri Poincaré
Campus Cité scientifique
59650 VILLENEUVE D'ASCQ

https://www.iemn.fr/plates-formes/cmnf

Chiffres clés

• 150 users / year
• 550 visits / year
• 220 projects, 34% of industrial projects
• 108 academic partners
• 48 industrial partners

Effectif

Effectif total : 18

Expertises

Skills

• Micro-devices and electronic components
• Deposition of materials, structuring of these materials by lithography / etching and in-line analysis
• Thin film deposition (metals, oxides, nitrides) by PVD (physical vapor deposition) and CVD (Chemical Vapor Deposition: AP CVD, LP CVD, PE CVD)
• Atomic layer deposition by thermal ALD and plasma
• Biomicrofluidics
• Soft lithography
• Optical and electronic lithography
• Chemical etching / Physical plasma etching / Ion implantation
• Epitaxial growth by Molecular Beam Epitaxy
• Laser structuring

Example(s) of projects

• Power transistor
• Photonic emission and reception components
• RF and THz components
• Microsource of energy
• MEMS, BIOMEMS

Collaborations/Partners/Scientific clients

National:
INSA Lyon, Institut de Chimie et des Matériaux Paris-Est (ICMPE), Institut de Minéralogie, de Physique des Matériaux et de Cosmochimie (IMPMC), Chimie des processus biologiques - Collège de France, Institut Jean Lamour, Institut de Physique Nucléaire de Lyon, Université Claude Bernard Lyon, Université du Littoral Côte d'Opale, Université Montpellier

International:
MIT (USA)

Services offers

Applications sectors

  • Networks / Telecom
  • Biotechnology
  • Energy
  • Defence
  • Aeronautics / Aerospace
  • Automotive industry
  • Electronic / photonics
  • Education / Training
  • Materials (Metal, Glass, Ceramic, Composite...)
  • Science / Research
  • Railway industry
  • Textile / clothing industry

Services provided

• Technological manufacture of micro-devices and electronic components
• Manufacture, characterization and use of biomimetic devices (microfluidic equipment, etc.)
• Material deposition (by evaporation, by sputtering, by atomic layer, thermal deposition, plasma deposition at
low temperature)
• Inkjet printing
• Growth of III-V materials (Ga, As, Sb, ...)
• Material characterization
• Structuring of materials by lithography / etching and in-line analysis
• Optical lithography
• Electronic lithography
• Chemical etching
• Inductive plasma etching
• Reactive ionic etching
• Assembly-Assembly
• Prototyping and development of demonstrators

Training offers

Training on specific equipment

Consulting services

We provide consulting services related to all our areas of expertise.

Equipments

The CMNF platform covers 1600m² of ISO6 certified clean room and an additional 260m² dedicated to the back-end. The center has a wide range of equipment ranging from the basics of the semiconductor industry to advanced micro-nanofabrication equipment. The total value of the equipment is approximately €30 million and includes equipment dedicated to specific stages of the technological process: laser lithography tools, electron beam equipment, deep engraving equipment, processing chambers, ion implanter, evaporation and sputtering tools, tube furnaces, optical microscopes, high resolution microscopes, polishing equipment, wafer cuts, welds and many more.

See the detailed list of equipment: http://lims.iemn.fr/WebForms/Equipment/EquipmentList.aspx

Equipments

Nom Modèle Marque
LPCVD furnace
Graphene growth oven Jetfirst 100F/
Inkjet printer
Metal deposition machine
Nanomask
TEPLA plasma system
Spectrometer
Mechanochemical polisher
Digital machining center

Ecosystem

Affiliated institutions / organisations

CNRS
Centrale Lille
Université Polytechnique Hauts-de-France (UPHF)
JUNIA

Unit(s) of attachment

Groups/Networks/Federations

RENATECH - Réseau français de nanofabrication
RS2E - Réseau sur le Stockage Électrochimique de l’Énergie
EuroNanoLab
RTVide - Réseau des Technologies du Vide
Graphene Flagship

Competitive cluster

Labellisations

Regional strategic areas of activity

  • Chemistry and Materials
    • Coatings and surface treatments
    • Industrial processes engineering, efficient processes
  • Digital World and Robotics
    • Electronics

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Thematics

Current thematics

  • Chemistry and Materials
    • Coatings and surface treatments
    • Industrial processes engineering, efficient processes
  • Digital World and Robotics
    • Electronics
Title

Current content

Micro-Nano Manufacturing Center
Type

Current content

Plateforme scientifique
Description

Current content

Our platform enables the fabrication of advanced components and systems in various fields such as (bio)MEMS, photonics, power components, high frequency/high throughput devices, micro-energy or acoustics. It is one of the 5 major French academic centers. Our expertise is recognized nationally and internationally in various fields such as electronic lithography or ion implantation. Composed of about twenty qualified engineers and technicians working in close collaboration with researchers, our team works on the most ambitious projects related to micro and nanotechnologies. We are structured around major areas of expertise: Growth and deposition of thin films, Lithography, Etching, Ion Implantation, Process Characterization, Assembly-Prototyping, and BioMicrofluidics. As a member of the RENATECH network (national network of large-scale micro-nanofabrication facilities), we can respond to any request for the development of technological components or the fabrication of devices from other companies or institutes.
Contact informations
Contact

Current content

Contact name Email phone number
LETHIEN Christophe christophe.lethien@univ-lille.fr (+33) 3 20 19 78 97
GRIMBERT Bertrand bertrand.grimbert@univ-lille.fr (+33) 3 20 19 78 43
URL

Current content

https://www.iemn.fr/plates-formes/cmnf

Address

Current content

Avenue Henri Poincaré
Campus Cité scientifique
59650 VILLENEUVE D'ASCQ
Keywords

Current content

Lithography, Etching, Ion Implantation, Bio-microfluidics, Clean room (ISO6), Renatech network, Nanofabrication, Nanoelectronics, Photonics, Flexible electronics, Microsystem, Thin film deposition
Our search domains
Skills

Current content

• Micro-devices and electronic components • Deposition of materials, structuring of these materials by lithography / etching and in-line analysis • Thin film deposition (metals, oxides, nitrides) by PVD (physical vapor deposition) and CVD (Chemical Vapor Deposition: AP CVD, LP CVD, PE CVD) • Atomic layer deposition by thermal ALD and plasma • Biomicrofluidics • Soft lithography • Optical and electronic lithography • Chemical etching / Physical plasma etching / Ion implantation • Epitaxial growth by Molecular Beam Epitaxy • Laser structuring
Key data

Current content

• 150 users / year • 550 visits / year • 220 projects, 34% of industrial projects • 108 academic partners • 48 industrial partners
Workforce

Current content

Effectif total : 18
Example(s) of projects

Current content

• Power transistor • Photonic emission and reception components • RF and THz components • Microsource of energy • MEMS, BIOMEMS
Example(s) of publications

Current content

Collaborations/Partners/Scientific clients

Current content

National: INSA Lyon, Institut de Chimie et des Matériaux Paris-Est (ICMPE), Institut de Minéralogie, de Physique des Matériaux et de Cosmochimie (IMPMC), Chimie des processus biologiques - Collège de France, Institut Jean Lamour, Institut de Physique Nucléaire de Lyon, Université Claude Bernard Lyon, Université du Littoral Côte d'Opale, Université Montpellier International: MIT (USA)
Collaborations/Partners/Private Clients

Current content

Services offers
Training offers

Current content

Training on specific equipment
Services offers

Current content

• Technological manufacture of micro-devices and electronic components • Manufacture, characterization and use of biomimetic devices (microfluidic equipment, etc.) • Material deposition (by evaporation, by sputtering, by atomic layer, thermal deposition, plasma deposition at low temperature) • Inkjet printing • Growth of III-V materials (Ga, As, Sb, ...) • Material characterization • Structuring of materials by lithography / etching and in-line analysis • Optical lithography • Electronic lithography • Chemical etching • Inductive plasma etching • Reactive ionic etching • Assembly-Assembly • Prototyping and development of demonstrators
Consulting services

Current content

We provide consulting services related to all our areas of expertise.
Equipments
Equipements spécifiques

Current content

  • LPCVD furnace
  • Graphene growth oven
    Jetfirst 100F/
  • Inkjet printer
  • Metal deposition machine
  • Nanomask
  • TEPLA plasma system
  • Spectrometer
  • Mechanochemical polisher
  • Digital machining center
Ecosystem
Affiliated institutions / organisations

Current content

  • University of Lille
  • CNRS
  • Centrale Lille
  • Université Polytechnique Hauts-de-France (UPHF)
  • JUNIA
Établissement(s) partenaire(s)

Current content

Unit(s) of attachment

Current content

  • Institute of Electronics, Microelectronics and Nanotechnology
Groups/Networks/Federations

Current content

RENATECH - Réseau français de nanofabrication RS2E - Réseau sur le Stockage Électrochimique de l’Énergie EuroNanoLab RTVide - Réseau des Technologies du Vide Graphene Flagship
Competitive cluster

Current content

Regional strategic areas of activity

Current content

  • Chemistry and Materials
  • Industrial processes engineering, efficient processes
  • Electronics
  • Digital World and Robotics
  • Coatings and surface treatments
Labelling

Current content

Personal informations
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